TEM-500 Series Gas Filters

TEM-500 Series Gas Filters

TEM 500 Series filters are specifically designed for filtration of semiconductor grade gasses where flow rates to 25 SCFM are required. This all welded asswmbly will deliver 0.003 micron absolute filtration where a high flow rate is required and space is small.

This PTFE membrane cartridge is encapsulated in a 316L stainless steel housing designed to give you a greater margin of safety with a 250 psig rating.

Specifications:

• Material: Poly Pro / PTFE
• Flow Rate: 0-700 L/min
• 99.9999999% Efficient @ 0.003 Microns
• 1.2 Square Feet of PTFE Membranes
• 316L Electro-polished Stainless Steel Housing
• 10 RA Interior Finish
• 250 psig Operating Pressure at 250°F
• Helium leak tested to 1 X 10 -9 cc/sec
• Compatible with all Semiconductor Grade Gasses
• Available with NPT, Compression, and Face Seal Fittings