TEM FILTER
TEM-300 Series Gas Filters
TEM FILTER
TEM-300 Series Gas Filters
TEM-300 Series Gas Filters
TEM-300 Series filters are specifically designed for filtration of semiconductor grade gases when flow rates to 120 SCFM are required. This all welded assembly will deliver 0.003 microns absolute filtration where a high flow rate is required and space is limited. The are available with 1" and 1½" connections.
This PFTE membrane and polypro supports cartridge is enclosded in a 316L stainless steel electro polished welded housing. Final assembly is pruged with filtered nitrogen for initial cleanliness. It is also suited for high temperature applications to 200°F / 97°C. Preconditioning is optional.
Specifications:
TEM-300 Series filters are specifically designed for filtration of semiconductor grade gases when flow rates to 120 SCFM are required. This all welded assembly will deliver 0.003 microns absolute filtration where a high flow rate is required and space is limited. The are available with 1" and 1½" connections.
This PFTE membrane and polypro supports cartridge is enclosded in a 316L stainless steel electro polished welded housing. Final assembly is pruged with filtered nitrogen for initial cleanliness. It is also suited for high temperature applications to 200°F / 97°C. Preconditioning is optional.
Specifications:
- Material: Poly Pro / PTFE
- Flow Rate: 0-2900 L/min
- 99.9999999% Efficient at 0.003 Microns
- 7.0 ft² of Teflon (PTFE) Membrane
- Polypropylene core, cage and end caps with Viton O-Ring
- 316L 10RA Electro Polished Stainless Steel Housing
- Helium Leak Tested to 1X 10 -9 Atm. Cc/sec.
- 100% Integrity Tested
- Compatible with all Semi-Grade Gases
- 250 psig Operating Pressure Rated at 250°F
- Available with Compression, Gasket Seal, and Butt Weld Fititngs
Brand
TEM FILTER
Product Number
TEM-300
Material
Poly Pro / PTFE
Flow Rate
0-2900 L/min
Status
Request information