TEM FILTER

TEM-1900 Series Gas Filters

TEM-1900 Series Gas Filters
TEM FILTER

TEM-1900 Series Gas Filters

TEM-1900 Series Gas Filters

TEM-1900 Series filters are specifically designed for point-of-use filtration of critical semiconductor grade gases for flows to 100 s.l.p.m. The PTFE membrane is totally supported by a PTFE core with a prefiltration layer of PTFE for reverse flow support.

All TEM filters are nitrogen purged, particle checked and repurged with nitrogen before vacuum packaging. This procedure allows for rapid clean up after installation.

Specifications:
  • Material: All Teflon®
  • Flow Rate: 0-100 L/min
  • 99.9999999% Efficient @0.003 Microns
  • Two Layers of PTFE Membrane
  • 39.5 cm sq. Effective Filtration Area
  • 3,000 psig operation pressure at 250°F
  • Helium leak tested to 1 X 10 -9 cc/sec.
  • Downstream Cleanliness Less Than 1 Particule Foot<0.01 Microns>
  • Volatiles<10 ppb Moisture>
  • Available with Gasket Seal, Compression and Butt Weld Tube Fittings