TEM-1700 Series Gas Filters

TEM-1700 Series Gas Filters

Number: TEM-1700
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Specifications

Number
TEM-1700
Material
Stainless Steel
Flow Rate
0-100 L/min

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Product description

TEM-1700 Series Gas Filters

The TEM 1700 Series filters are intended for the particulate filtration of ultra high purity semiconductor grade gasses. The stainless steel construction has excellent flow characteristics for such a compact design. The 1770 Series is 100% pressure tested, integrity tested, and helium leak checked. All filters are vacuum packed in a clean room. Available with Buttweld, Gasket Seals and Compression Fittings.

Specifications:
  • Material: Stainless Steel
  • Flow Rate: 0-100 L/min
  • 316L Stainless Steel Construction
  • Sintered Stainless Steel Fiber Filter Medium
    • 99.9999999% of all particules at 10 s.l.p.m.
    • 99.9999%of all particles at 100 s.l.p.m.
  • Internal finish is 7 Microns in Ra electropolished
  • All metal construction has excellent bake-out characteristics
  • Preconditioned cleanliness
    • less than 1 particle / ft3
    • less than 10 ppb THC
    • less than 10 ppb moisture available
  • 100% Helium leak tested to 10-9 atm cc/sec
  • Maximum operating pressure of 1000 psig at 250°F