TEM-1400 Series Gas Filters

TEM-1400 Series Gas Filters

Number: TEM-1400
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Specifications

Number
TEM-1400
Material
Teflon
Flow Rate
0-2100 L/min

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Product description

TEM-1400 Series Gas Filters

TEM-1400 Series filters are specifically designed for filtration of semiconductor grade gases when flow rates to 75 SCFM are required. This all-welded assembly will deliver 0.003 micron absolute filtration where a high flow rate is required and space is small.

This all Fluoropolymer cartridege is enclosed in a 316L stainless steel electro-polished weld housing. Final assembly is purged with filtrated nitrogen for initial cleanliness. It is also suited for high temperature applications to 300°F/150°C.

Specifications:
  • Material: All Teflon®
  • Flow Rate: 0-2100 L/min
  • 99.9999999% Efficient @ 0.003 Microns
  • 3.0 ft sq of PTFE Membrane
  • All Fluoropolymer Construction with PTFE encapsulated Viton O-ring
  • 316L, 10Ra Finish, Electro Polished Stainless Steel Housing
  • 250 psig Operation Pressure Rated at 250 F
  • Helium leak tested to 1 X 10 -9 cc/sec
  • 100% Integrity Tested
  • Available with Compression, Gasket Seal, and Butt Weld Fittings
  • Compatible with all Semiconductor Grade Gases