TEM-1200 Series Gas Filters

TEM-1200 Series Gas Filters

Number: TEM-1200
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Specifications

Number
TEM-1200
Material
Teflon
Flow Rate
0-5700 L/min

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Product description

TEM-1200 Series Gas Filters

TEM-1200 Series filters are specifically designed for filtration of semiconductor gases when flow rates to 200 SCFM are required. This all-welded assemply will deliver 0.003 micron absolute filtration where a high flow rate is required and space is limited. Available with 1" and 1.5" connections.

This Fluoropolymer Cartridge is enclosed in a 316L stainless steel electro-polished welded housing. Final assembly is purged with filtrated nitrogen for initial cleanliness. It is also suited for high temperature applications to 300°F/150°C. Preconditioning is optional.

Specifications:
  • Material: All Teflon®
  • Flow Rate: 0-5700 L/min
  • 99.9999999% Efficient @ 0.003 Microns
  • 11.0 ft. sq. of PTFE Membrane
  • All Fluoropolymer Construction with PTFE Encapsulated Viton O-ring
  • 316L 10 RA Electropolished Stainless Steel Housing
  • 250 psig Operation Pressure rated at 250F
  • 100% Integrity Tested
  • Helium Leak Tested to 1 X 10 -9 cc/sec
  • Compatible with Semi-Grade Gases
  • Available with Compression, Gasket Seal, and Butt Weld Fittings