TEM FILTER
TEM-100 Series Gas Filters
TEM FILTER
TEM-100 Series Gas Filters
Brand
TEM FILTER
Product Number
TEM-100
Material
Poly Pro / PTFE
Flow Rate
0-8550 L/min
Status
Request information
TEM-100 Series Gas Filters
TEM-100 Series filters are specifically designed for filtration of semiconductor gases when flow rates to 7300 SCFM are required. This all-welded assemply will deliver 0.003 micron absolute filtration where a high flow rate is required and space is limited. Available with 1" and 1.5" connections.
This PTFE Membrane and Polypro Supports Cartridge is enclosed in a 316L stainless steel electro-polished welded housing. Final assembly is purged with filtrated nitrogen for initial cleanliness. It is also suited for high temperature applications to 200°F / 97°C. Preconditioning is optional.
Specifications:
TEM-100 Series filters are specifically designed for filtration of semiconductor gases when flow rates to 7300 SCFM are required. This all-welded assemply will deliver 0.003 micron absolute filtration where a high flow rate is required and space is limited. Available with 1" and 1.5" connections.
This PTFE Membrane and Polypro Supports Cartridge is enclosed in a 316L stainless steel electro-polished welded housing. Final assembly is purged with filtrated nitrogen for initial cleanliness. It is also suited for high temperature applications to 200°F / 97°C. Preconditioning is optional.
Specifications:
- Material: Poly Pro / PTFE
- Flow Rate: 0-8550 L/min
- 99.9999999% Efficient @ 0.003 Microns
- 16.5 ft2 of PTFE Membrane
- Polypropylene core, cage and end caps with Viton O-ring
- 316L 10 RA Electropolished Stainless Steel Housing
- 250 psig Operation Pressure rated at 250F
- 100% Integrity Tested
- Helium Leak Tested to 1 X 10 -9 cc/sec
- Compatible with Semi-Grade Gases
- Available with Compression, Gasket Seal, and Butt Weld Fittings