TEM-100 Series Gas Filters

TEM-100 Series Gas Filters

Number: TEM-100
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Specifications

Number
TEM-100
Material
Poly Pro / PTFE
Flow Rate
0-8550 L/min

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Product description

TEM-100 Series Gas Filters

TEM-100 Series filters are specifically designed for filtration of semiconductor gases when flow rates to 7300 SCFM are required. This all-welded assemply will deliver 0.003 micron absolute filtration where a high flow rate is required and space is limited. Available with 1" and 1.5" connections.

This PTFE Membrane and Polypro Supports Cartridge is enclosed in a 316L stainless steel electro-polished welded housing. Final assembly is purged with filtrated nitrogen for initial cleanliness. It is also suited for high temperature applications to 200°F / 97°C. Preconditioning is optional.

Specifications:
  • Material: Poly Pro / PTFE
  • Flow Rate: 0-8550 L/min
  • 99.9999999% Efficient @ 0.003 Microns
  • 16.5 ft2 of PTFE Membrane
  • Polypropylene core, cage and end caps with Viton O-ring
  • 316L 10 RA Electropolished Stainless Steel Housing
  • 250 psig Operation Pressure rated at 250F
  • 100% Integrity Tested
  • Helium Leak Tested to 1 X 10 -9 cc/sec
  • Compatible with Semi-Grade Gases
  • Available with Compression, Gasket Seal, and Butt Weld Fittings