Applications
- General use: Vacuum wands are utilized to pick up and transport wafers from one location to another without adding particles.
- Sorting: For manual wafer sorting applications, vacuum wands allow operators to move wafers safely and precisely within a parent lot. They can also be used to combine lots together, add test wafers, and replace any damaged wafers, as necessary.
- Inspection - Operators can use vacuum wands to pull out a wafer from a parent lot and inspect it under specialized lighting to look for defects. This ensures that the process has been successful and that the wafer meets the required specifications
- Rescue – Vacuum wands can be used to remove stranded substrates from cassettes, pods, and process tools when automation underperforms.
The WHS-V7 is a high-performance tabletop portable vacuum wand engineered for demanding wafer handling and small device management in cleanroom environments. With its powerful 800 mBar (23.6” Hg) vacuum, the WHS-V7 is designed to meet the rigorous demands of full production applications, making it ideal for heavy-duty tasks beyond simple wafer rescue or light production. Its portable, self-contained design provides independence from vacuum lines, allowing for complete mobility and continuous operation in high-production environments.
The WHS-V7 is available in a WHS-V7-300 model for 300 mm wafers.
With a high-performance battery providing over 20 hours of continuous runtime per charge, the WHS-V7 is optimized for extended use in cleanroom environments. The system features a normally open vacuum flow with an auto-on pick-up feature allowing for instant operation when removed from its holder, while an automatic shutoff saves energy when the tool is not in use.
The advanced H14 HEPA filter captures 99.99% of 0.3μm particles, ensuring contamination control in ISO 3 (FS209E Class 1) cleanroom standards. The WHS-V7’s ESD-safe design, ergonomic construction, and universal power compatibility make it an ideal solution for full-scale production wafer handling and small device applications.
Manufactured in an ISO9001-certified and CE-certified environment, the WHS-V7 sets the standard for high-performance vacuum wands in demanding production settings.
