SH60-type Bellows Pump
SH60-type Bellows Pump
SH15-type Bellows Pump
The Innodis Bellows Pump SH60-type is engineered for demanding chemical handling applications where reliability, purity, and operational safety are critical. Designed with advanced PTFE construction, the pump delivers exceptional resistance to aggressive chemicals and high-temperature processes while minimizing wear and maintenance requirements.
Replacement part for Pillar®: PE-40HBH and PE-40MA
Key Features
- All wetted parts are manufactured from PTFE (Polytetrafluoroethylene) for superior chemical compatibility.
- PFA-coated exterior protects metal components from exposure to corrosive environments.
- Suitable for wet process circulation, CMP (Chemical Mechanical Planarization) processes, and chemical distribution systems.
- Integrated proximity sensor monitors pump performance and detects operational abnormalities or reduced speed.
- Built-in leak sensor automatically detects leakage and stops pump operation to enhance safety and protect equipment.
- Can be used with ICU controller
Performance curve SH15, SH30 and SH60 type
Advantages & Benefits
Exceptional Chemical Resistance
- PTFE fluid-contact components provide outstanding resistance to aggressive chemicals.
- Ensures process purity by preventing contamination from metallic parts.
High-Temperature Capability
- Designed to operate reliably in elevated-temperature applications.
- Maintains performance and durability under demanding process conditions.
Reduced Wear and Longer Service Life
- Bellows design combined with PTFE materials minimizes internal component wear.
- Reduces maintenance frequency and lowers total cost of ownership.
Enhanced Process Safety
- Real-time monitoring through the proximity sensor enables early detection of operational issues.
- Automatic leak detection and shutdown help prevent chemical spills, equipment damage, and unplanned downtime.
Maximum Corrosion Protection
- PFA-coated exterior shields metal components from corrosive environments.
- Extends equipment lifespan in harsh chemical processing applications.
Reliable Operation for Critical Processes
- Ideal for semiconductor, chemical processing, and other high-purity applications where consistent fluid handling is essential.
Typical Applications
- Wet Process Circulation Systems
- CMP (Chemical Mechanical Planarization) Processes
- Chemical Distribution and Supply Systems
- High-Purity Chemical Transfer Applications
Innodis Bellows Pumps combine chemical resistance, process safety, and long-term reliability, making them an ideal solution for critical fluid handling applications in demanding industrial environments.
