Ultra high-purity chemical pump for the semiconductor industry.
Model: SEMI E Materials: center housing UPPE; side housings UPPE/PA Pump sizes: 20, 50, 100 Products: slurries
The pumps from our SEMI DMS series have been designed especially for the purpose of semiconductor industry. The whole assembly process of these unique products is completed in a CLASS 100 CLEAN ROOM, involving a double cleaning of the parts, their testing with deionized water, and finally sealing in plastic foils.
FEATURES
No metal parts SEMI T, H and E
No elastomeric O-rings
Lubrication-free air motor
Cleanroom Class 100 assembled, tested with de-ionized water and double packaged
Durable TFM diaphragms, for extended flex life
Four materials for different applications with max. temp. 200°C
Machined from solid material on a very highly advanced CNC Machining and Turning Centre controls and monitoring available for all sizes
Very easy repairing, just 40% spares comparing pulsation dampers, leak detection, electronic/pneumatic
