Profile and spike thermocouples

Profile & spike thermocouples
Conax profile and spike thermocouples are high-precision temperature sensors designed for accurate temperature measurement and control in semiconductor thermal processing. Available in both standard and custom configurations, these sensors deliver the reliability, repeatability, and durability required for diffusion, oxidation, annealing, and other high-temperature furnace applications.

Designed for vertical & horizontal furnaces
Conax manufactures profile and spike thermocouples for both vertical and horizontal furnace systems used throughout the semiconductor, photovoltaic, and LED industries. Whether you need a direct replacement or a custom-engineered solution, our thermocouples are designed to integrate seamlessly with your process equipment.

Conax thermocouples are compatible with many of the industry's leading furnace platforms, including:

• ASM®* (*ASM® is a registered trademark of ASM International. Conax Technologies and its products are not affiliated with, endorsed by, or sponsored by ASM International.)
• BTI/Tempress
• MRL
• ATV Technologies
• Centrotherm
• SVCS
• Aviza / SVG / Thermco
• TEL
• Kokusai
• Tystar

Standard or custom configurations
Every thermal process has unique requirements. That's why Conax offers both off-the-shelf and fully customized profile and spike thermocouples to meet your specific application. Our engineering team can help develop a solution optimized for your process conditions, equipment, and temperature control requirements.

Available thermocouple types
Conax profile and spike thermocouples are available in a range of noble and base metal calibrations, including:

• Type B (Pt-Rh)
• Type R (Pt-Rh)
• Type S (Pt-Rh)
• Type K
• Type N

These options allow you to select the thermocouple best suited to your temperature range, process environment, and accuracy requirements.

Choose from one of our standard designs for either vertical or horizontal type furnaces, or let us work with you to develop a customized design.  Contact us for all available options and customizations!