Organic Material

This process requires high precision and uniformity of thin films by accurately controlling temperature and deposition rate.

Applications

• OLEDs.
• Organic solar cell.
• Materials research.

Configurations

• Flexible substrate size up to 470 x 370 mm² glass.
• Excellent thin-film uniformity of less than ±3%.
• Effusion cell (metal, ceramic, graphite, PBN crucible available) for Organic materials.
• Auto deposition rate control: 0.01 Ǻ/sec.
• Effusion cell evaporate control accuracy：±0.1℃.
• Multiple sources with sequential operation or co-deposition.
• Positioning of glass substrates and mask aligned to within ±5μm with a CCD camera.
• Shutters are installed each evaporation source and substrate.

Chamber

• Constructed from 304 stainless steels, water cooled via external welding stainless steel 304.
• Full-width opening door (HV chamber) integrated two viewports with shutters for observing substrate and evaporation sources.
• Up to 12 evaporation sources can be installed in one chamber.
• Ultimate vacuum of chamber about 10^-8 Torr .

Options

• Intergrated with Load-Lock, robot arm, glove box.
• Residual gas analyzerl.