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MIDAS SYSTEM CO., Ltd.

Mask Aligner and Exposure System - 2-5 kW UV Lamp

Mask Aligner and Exposure System - 2-5 kW UV Lamp
MIDAS SYSTEM CO., Ltd.

Mask Aligner and Exposure System - 2-5 kW UV Lamp

Product description
Specifications
Datasheet & videos
Mask Aligner and Exposure System - 2-5 kW UV Lamp

Model: MDA-20000SA

Specifications:
  • Type: Joystick control Semi-Auto (Mask Aligner)
  • Mask size: up to 610 x 610 (User spec.)
  • Substrate size: 500 x 500 (User spec.)
  • UV lamp& Power: 2kW & power supply, 5kW & Power supply
  • Uniform beam size: 600 x 600 (User spec.)
  • Beam Uniformity:<±7% >
  • Beam wavelength: 350 ~ 450nm
  • Process mode: Soft, Hard contact& Proximity
  • Substrate chuck moving: x,y,z& (theta) (Motorized)