M-2111 Series Ultrasonic Flow Meters

M-2111 Series Ultrasonic Flow Meters

The M-2111 Series flow detector has non-contact transducers and a PFA flow tube design without dead pockets.
Its advanced signal converter with DSP electronics offers unmatched flow measurement capabilities even in tough applications. The M-2111 is an ideal choice for use in the semiconductor industry where extreme cleanliness and anti-corrosiveness are required.

Features:

• Accuracy ± 1% of reading
• Repeatability ± 0.5% of reading
• All wetted parts made of New PFA (AP-211SH)
• Contamination free from ions or particles
• Corrosion resistant, no metal parts
• Wide rangeability of 100:1 (Typical)
• Easy installation with compact meter body
• Low flow measurements down to 2 mL/min
• Measures viscous fluids
• Ease of parameter configuration through front panel LCD and Keypad, or PC communication software

Applications:

• CMP, ECD, Electroless Deposition, Wet Clean and Track tools in semiconductor manufacturing
• Solar PV equipment
• Medical Devices
• Wet process / Chemical distribution systems
• Laser equipment
• Cooling systems