Kemlab

KL 6000 Series General Purpose Positive Thick

KL 6000 Series General Purpose Positive Thick
Kemlab

KL 6000 Series General Purpose Positive Thick

KL 6000 series are positive photoresists for use in i-Line, g-Line and broadband applications. KL6000 offers high sensitivity, high throughput, and excellent process latitude.
 

  • Cover 2.5 – 12 µm in a single coat
  • Designed for use with industry standard TMAH 0.26N developers
  • No PEB necessary
  • Competes with SPR™ 220-3.0/S1827™, SPR™ 220-4.5, SPR™ 220-7.0, and S1827™