Kemlab

KL 5300 Series General Purpose Positive Thin

KL 5300 Series General Purpose Positive Thin
Kemlab

KL 5300 Series General Purpose Positive Thin

KL5300 series are positive photoresists for use in i-Line, g-Line and broadband applications. They offer high sensitivity, high resolution and excellent process latitude.
 

  • Cover 0 – 2.5 µm in a single coat
  • Designed for use with industry standard TMAH 0.26N developers
  • Achieve resolution 0.55 µm
  • Competes with S1805™, S1808™, S1811™, S1813™, S1818™