0
InControl Engineering LLC

Heater Block Resistance Smart Sensor - 2-Zone

Heater Block Resistance Smart Sensor - 2-Zone
InControl Engineering LLC

Heater Block Resistance Smart Sensor - 2-Zone

Reduces wafer scrap and rework
Eliminates unscheduled maintenance downtime
Monitors while the furnace is idle
Fast same-day integration
Precision resistance measurement

Embrace the power of Industry 5.0 to connect your equipment, manufacturing process and personnel closer than ever before. SPS provides smart sensors that employ high speed measurements in conjunction with edge processing to enhance your predictive maintenance capabilities beyond what is achievable with the existing data collection and analysis on your equipment.

BENEFITS

  • Reduces wafer scrap and rework
  • Eliminates unscheduled maintenance downtime
  • Lowers equipment cost of ownership
  • Prevents equipment damage
  • Monitors while the furnace is idle
  • Equipment matching and benchmarking
  • Data resides safely behind your firewall
  • Fast same-day integration

True Predictive Maintenance
Replace heater blocks based on monitored health rather than at failure or by hours in service

Precision Resistance Measurement
Resistance is calculated from high-speed measurements of the actual current and voltage waveforms (not RMS)

Fault Prediction and Classification

  • Element wire aging and failure
  • SCR/SSR failure
  • Low input voltage
  • Wiring and contact failure
  • Low input voltage

Health monitoring at your fingertips
Access anywhere from your smartphone, tablet, or personal computer

Alarm notification
Easily integrate alarms directly to the equipment control system and automatically send e-mail or SMS messages

Instant Data Storage and Visualization
Collect, store, and visualize up to a year of resistance data directly on the smart sensor

External Data Analysis
Export data from the user interface into Microsoft Excel

Software API
Easily integrate smart sensor data with any factory system for external collection and analysis

SPECIFICATIONS

  • Up to two 2-zone heater blocks
  • 10 kHz measurement sampling frequency
  • Split-core AC current transformers 25 - 100 A
  • Adjustable AC voltage measurement range 0 - 220 V
  • TC input: K, S, R, E, J, T, B, N, & WRe5-WRe26
  • RTD input: Pt100 & Cu50
  • Dry contact alarm relay
  • Resistance measurement analog outputs
  • 1.2 GHz Broadcom BCM2837 CPU 1 GB RAM
  • 32 GB MicroSD SSD (standard) or 120 GB SATA SSD with no removable MicroSD cards (optional)
  • 100 Base-T Ethernet LAN
  • 2.4 Ghz 802.11n Wireless LAN
  • Power input 100-240 VAC 50/60 Hz 0.5-0.2 A
  • Operating temperature 14 to 158°F (-10 to +70°C)
  • NGINIX web server
  • NTP time synchronization
  • SMTP e-mail interface
  • User upgradable software
  • DIN rail mount
  • Smart sensor 1-block dimensions:
    • 6.5 x 4.6 x 2.7” (16.5 x 11.7 x 6.9cm)
  • Smart sensor 2-block dimensions:
    • 8.6 x 4.6 x 2.7” (21.8 x 11.7 x 6.9cm)
  • Split-core current transformer dimensions:
    • 0.75” (1.9cm) Ø wires
    • 2.0 x 2.1 x 1.0” (5.1 x 5.3 x 2.5cm)
  • One-year hardware warranty