GSSM Series

esPRO’s GSSM Series Gas Filters are constructed from 316L stainless steel, designed for high-temperature and high-pressure gas filtration in semiconductor processes. These filters ensure high flow rates, low pressure drop, and excellent chemical compatibility, making them ideal for applications such as compressed air, process gas, and toxic gas.

The hydrophobic PTFE filter media, supported by PFA 440HP, provides durability and chemical resistance. The housing has an interior surface finish of ≤ 0.18 μm / 7 μin Ra, with an E-FKM O-ring as standard and FFKM available. The filters support a maximum working pressure of 20.7 MPa at 120ºC and a removal rating of ≥0.003 μm, with a maximum flow rate of 15 L/min and filter area of 13.5 cm² (0.015 ft²).

Each filter undergoes 100% helium leak testing and integrity testing for quality assurance. Available with two removal ratings and five inlet/outlet connection types, the GSSM series ensures flexibility in system integration. These filters are manufactured in a cleanroom environment under ISO9001 oversight, ensuring high product cleanliness for critical applications.