POLOS

FR-Scanner - Automatic characterization of single or stack of films

FR-Scanner - Automatic characterization of single or stack of films
POLOS

FR-Scanner - Automatic characterization of single or stack of films

FR-Scanner - Automatic characterization of single or stack of films

FR-Mapper module is an upgrade of FR-Basic tool that allows for automatic characterization of single films or stack of films over large areas or preselected positions through scanning.

In particular FR-Mapper allows for automatic, at high resolution XY mapping of:

 

  • Film thickness
  • Optical properties (n& k)
  • Reflectance
  • Non-uniformity
  • Roughness
  • FR-Mapper


In this configuration, the reflection probe of the FR-Basic is mounted on the holder on the FR-Mapper module that has been designed in such a way to keep the optical probe at a fixed point while the sample is moving. This configuration provides the optimum results in terms of repeatability and precision. However, if smaller footprints are needed, other configurations are possible, upon customer request. The entire system (hardware – software) is shipped ready for measurements (turn-key solution). It and can be easily used by anyone with basic computer skills without any deep knowledge of optics. The only additional part needed is a computer with two free USB ports running Windows XP/Vista/7.