ESPRO® SPRAY ACID TOOL (REFURB)

A Spray Acid Tool is designed for batch wafer processing for acid etch or clean processes up to 300 mm wafers. What SAT brands can be refurbished? Semitool, Siconnex, Ramgraber and Rhetech

Scope of Work

• Dismantling of the entire electrical and pneumatic components from the existing housing 
• New motor and motor controller, different types available
• New front and rear 12“ Touch panel
• New PLC Controller
• New setup of tubing, fittings (Pillar, Flare-tec) electrical and pneumatic components
• New valves: SMC, Gemü and Surpass
• New SPS drain and deliver manifolds
• New chemical pumps, can be customer specified, standard Levitronix
• New dosing pumps
• New designed process tanks
• New rotor/inserts available
• Various process enhancements available
• Process requalification support
• New/modified outer housing
• Complete re-wiring of the tool
• New user-friendly GUI
• SECS GEM II Interface
• Pre-Source inspection at supplier
• Shipping acceptance test at supplier
• On-site final Test
• CE conformity, Risk assessment 
• Documentation and circuit diagram (Eplan P8)

The same applies for the SST models!