Espro Radial Array Megasonic Solution

Our EsPRO Megasonic solution replaces curved-crystal designs, including legacy Verteq / Marteq or Sunburst Turbo/Turbo Plus megasonic arrays. 

Our experience in replacing curved crystal systems is even more valuable as OEM spare parts and repair services are no longer available.

Megasonic products supplied by Verteq Systems have been discontinued for over 10 years. There remains a large installed base of those products that are candidates for replacement with our EsPRO products. The VQ Interface Module (VQI) will facilitate the installation of our products into tools and systems while maintaining the original/OEM host tool controls and components. 

There were multiple versions and configurations of Verteq Systems megasonic controllers and generators. Our VQI is designed to be compatible with certain versions of Verteq Systems products.

Please consult SPS for further details and to review the document as well as product and system diagrams to determine if your application is compatible with the VQ Interface.

The solution is complemented by the advanced Espro Impulse Megasonic RF generator. The IMPulse's electronics combine reliable RF with advanced operation. The internal microcontroller continuously monitors and reports key megasonic parameters.

In short, our complete Espro Radial Array solution provides you with a platform that will allow you to continue your megasonic processes for many years to come.