SYSKEY TECHNOLOGY Co., Ltd.

Diamond Like Carbon (DLC)

Diamond Like Carbon (DLC)
SYSKEY TECHNOLOGY Co., Ltd.

Diamond Like Carbon (DLC)

Flexible substrate size
 Multi wafers Process
 Excellent thin-film uniformity of less than ±3%

Diamond-like Carbons are formed from combining high concentrate sp3 bonding (Diamond) with low concentrate sp2 bonding.

Applications

  • Wear coatings for medical & commercial products.
  • Encapsulation, isolation.
  • Scratch-resistant displays.

 

Configurations

  • Flexible substrate size.
  • Multi wafers Process.
  • Excellent thin-film uniformity of less than ±3%.
  • Mass flow controllers with highly uniform gas distribution.
  • Direct and remote capacitive coupled plasma (CCP).

 

Chamber

  • Flexible chamber sizes depend on substrate size and applications.
  • Chamber temperature control by using heater jacket, Cooling water, Hot water.