SURPASS INDUSTRY

Delivery Manifolds

Delivery Manifolds
SURPASS INDUSTRY

Delivery Manifolds

Delivery Manifolds

Another example of a custom-design manifold, improving process quality in a Semitool® (SAT& SST). Here the chemical- and cleaning path are divided to avoid chemical contamination in the process chamber during the drying process. Both fluid paths are secured by cross-plumbed valves at the top of the manifold.

Note:For solvent applications manifolds are made out of black PTFE material to ensure ESD conductivity.