CMP Vibration Smart Sensor 3-input

Embrace the power of Industry 5.0 to connect your equipment, manufacturing process and personnel closer than ever before. ISPS provides smart sensors that employ high speed measurements in conjunction with edge processing to enhance your predictive maintenance capabilities beyond what is achievable with the existing data collection and analysis on your equipment.

BENEFITS

• Reduces wafer scrap and rework
• Eliminates unscheduled maintenance downtime
• Lowers equipment cost of ownership
• Equipment matching and benchmarking
• Data resides safely behind your firewall
• Fast same-day integration

True predictive maintenance 
Replace parts and consumables based on monitored health rather than at failure or by hours in service

Frequency-based vibration monitoring 
Fast Fourier Transform (FFT) converts time-based vibrations into the frequency domain

Fault prediction 

• Polishing heads
• Platens/Tables
• Pad conditioners
• Brush boxes
• Spin rinse dryers
• Wafer handling
• Wafer scratching

Modeling 
Empirical model builder allows users to create custom vibration models

Data analytics and alert limits 
Specialized health metrics with independent user defined alarm and abort limits

Alert notification 
Easily integrate alerts directly to the equipment control system and automatically send e-mail or SMS messages

Instant Data Storage and Visualization
Collect, store, and visualize up to a year of health metric data directly on the smart sensor

External Data Analysis
Export data from the user interface into Microsoft Excel

Software API 
Easily integrate smart sensor data with any factory system for external collection and analysis

SPECIFICATIONS

Vibration Smart Sensor Module

• Up to 8 accelerometers
• 5kHz frequency range (Nyquist) with a 10kHz measurement sampling frequency
• Two dry contact alert relays
• 1.2GHz Broadcom BCM2837 CPU 1GB RAM
• 32GB MicroSD SSD (standard) or 120GB SATA SSD with no removable MicroSD cards (optional)
• 100 Base-T Ethernet LAN
• 2.4Ghz 802.11n Wireless LAN
• Power input 100-240VAC 50/60Hz 0.5-0.2A
• Operating temperature 14 to 158°F (-10 to +70°C)
• NGINIX web server
• NTP time synchronization
• SMTP e-mail interface
• User upgradable software
• DIN rail mount
• Dimensions
  • 2-channel: 6.3 x 4.6 x 2.7” (16.0 x 11.7 x 6.9cm)
  • 4-channel: 9.3 x 4.6 x 2.7” (23.6 x 11.7 x 6.9cm)
  • 6- channel: 12.3 x 4.6 x 2.7” (31.2 x 11.7 x 6.9cm)
  • 8- channel: 15.3 x 4.6 x 2.7” (38.9 x 11.7 x 6.9cm)
• One-year hardware warranty

Standard Accelerometer

• Single-axis ceramic piezo (IP68 enclosure)
• Sensitivity 100mV/g (10.2 mV/(m/s²))
• Operating temperature -65 to 250°F (-54 to +121°C)
• Bracket and thread adapter mounts
• Integral cable 10’ (3m)
• Dimensions 0.6” (14mm) Ø x 2.5” (64mm) length
• Other accelerometer options available