CLFC300 Ultrasonic flow controller

The CLFC300 series is flow controller which integrates all functions of an ultrasonic flowmeter, a control valve, and a circuit for flow computation and valve control. Its control function can quickly follow the target flow rate. Thus, the CLFC300 is ideal for liquid control which is essential in semiconductor manufacturing for the constant supply of chemicals and flow control of DIW and slurry.

• Improved flow measurement
  Flow measurement is stabilized by faster calculation and improved bubble resistance.
• Excellent controllability
  A quick step response is achieved by state-of-the-art signal processing technology. The CLFC300 tracks variations in the flow and returns it to the set point within 1.5 seconds.
• Two valves for wider applications
  A needle valve is available for chemical liquids and DIW, and a pinch tube valve for slurry liquids. The STA-PURE style pcs tube is added to the lineup of pinch tubes. This tube has excellent durability and does not need to be replaced regularly.
• Lightweight and compact
  An ultrasonic flowmeter, a control valve, and a circuit are all contained in a single case. In addition, the layout was revised to make the controller more compact: it is now 20% smaller and 35% lighter.