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Tokyo Keiso CO., LTD.

CLFC1000 Integrated Flow Controller

CLFC1000 Integrated Flow Controller
Tokyo Keiso CO., LTD.

CLFC1000 Integrated Flow Controller

World's smallest class, featuring an integrated, compact, and space-saving design
 Flow rate control of pure water, ultrapure water, various chemicals, CMP Slurries, etc.
 Equipped with a highly accurate PFA sonic flowmeter
Product description
Specifications
  • The world's smallest class, featuring an integrated, compact, and space-saving design
  • Suitable for flow rate control of pure water, ultrapure water, various chemicals, CMP Slurries, etc.
  • Equipped with a highly accurate PFA sonic flowmeter

Applications

Flow rate control of pure water, ultrapure water, various chemicals, CMP Slurries, etc.

 

Measurement & control target Liquids in general (DIW, various chemicals, slurries, etc.)
Flow range Slurries (pinch tube valves): 50 to 1000 mL/min
Purified water and chemical solutions (needle valves): 2.5 to 25 mL/min, 400 to 4000 mL/min
Maximum operating pressure 0.4 MPa max.
Fluid temperature 5 - 50℃
Flow rate accuracy ±1% R.D.
Control accuracy

±1.5% R.D.
Power supply 24 V DC (±10%)
Control I/O 4-20 mA, 0-10 V
Dimensions 28 (w) x 148 (d) x 111 (h) (excluding mounting plate and fittings)
Process connection 1/4", 3/8" SUPER300 type Pillar fitting
1/4", 3/8" Flare type fitting
Material PFA, PTFE (pinch tubes)