Cleaning Service

In addition to standard RCA cleaning processes (SC-1, SC-2, and SPM), we offer a wide range of cleaning solutions to meet diverse requirements. These include physical cleaning methods such as scrub cleaning and two-fluid cleaning using proprietary cleaning agents developed in-house, as well as solvent-based cleaning for applications such as surface protection resist removal.

Main Cleaning Types:

• Physical cleaning: scrub cleaning, ultrasonic cleaning and two-fluid cleaning
• Chemical cleaning: RCA cleaning or special cleaning

Cleaning materials and sizes

Compatible Materials: We handle a wide range of materials, including chip-shaped wafers as well as SEMI-standard wafers.
Sizes: 2" up to 8" and 12"

*Applicable cleaning methods differ for each wafer size. Please request a quotation, and our sales managers will be pleased to support you in identifying the solution that best meets your requirements.