Chemical Tank Immersion Heater Resistance Smart Sensor

Do your immersion heaters fail without warning? Are you looking for a more systematic approach to determine when your immersion heaters should be replaced?

SPS provides smart sensor technology that precisely measures the immersion heater resistance in real-time to prevent product scrap and rework. This cost-effective predictive maintenance system is turn-key, maintenance-free, and completely independent of the equipment and process state.

FEATURES

• Real-time resistance monitoring of the chemical tank immersion heaters used by the Semitool and SiConnex SAT/SST tools
• Detect impending failures attributed to
  • Resistive heating wire fatigue
  • Compromised Teflon coating that protects the heating wire from the chemical bath
• Current and voltage waveforms are directly sampled to provide accurate resistance measurements in real time regardless of the element firing state
• Split core current sensor provides ease of installation
• High resistance alarm signals (warning)
• Immersion heater abort signals (failure)
• On board relays disable the immersion heater when the failure event is imminent
• Real-time resistance measurements by tank can be integrated into your existing FDC system for additional analysis and monitoring
• Seamless and flexible integration options

BENEFITS

• Minimizes product scrap or rework attributed to an immersion heater failure during processing
• Increases tool availability and uptime by reducing unscheduled maintenance downtime
• Lowers your equipment cost of ownership by maximizing the immersion heater lifecycle when they are replaced by time intervals
• Turn-key and maintenance-free solution