Axcelis Fusion bake (Gemini) thermochuck replacement

Upgrade Your UV Bake Thermo-chuck with Enhanced Reliability and Performance

Need a replacement UV bake thermo-chuck for your Gemini Photostabilizer? SPS offers an improved, and high-quality solution for the Axcelis Fusion bake (Gemini) thermo-chuck.

This replacement thermo-chuck is engineered with key improvements to address common failure points and extend the lifetime:

• Reinforced waterline fittings to prevent breakage
• High quality aluminum chuck base to minimize the change of microcracks and steam leaks
• Improved contact between heating element and chuck to prevent burning up the element

In addition, the internal trace element has been upgraded for a more uniform and stable heating profile, improving overall process consistency.

Each unit undergoes rigorous multi-phase testing to ensure premium quality and durability.

Due to the upgraded heater tab design, this thermo-chuck requires an easy to install adapter plate and collar for use with the Fusion/Axcelis Gemini tool.

This UV Bake Thermo-chuck is a replacement for Axelis Part Number: 110165060

Contact SPS-International today to learn more about the UV bake thermo-chuck replacement.