0
WAFTECH by SPS

Automatic Wafer Sorter

Automatic Wafer Sorter
WAFTECH by SPS

Automatic Wafer Sorter

12” wafer Handling (Optional for 8”)
4x Loadport For FOSB/FOUP. Capable to handle Jelly Jar, Coin box and FOSB
Detection of Wafer Protrusion from Cassette
Built-in WID OCR Reader
Product description
Specifications
  • 12” wafer Handling (Optional for 8”)
  • 4x Loadport For FOSB/FOUP. Capable to handle Jelly Jar , Coin box and FOSB.
  • Detection of Wafer Protrusion from Cassette
  • Wafer Cross Slot Detection
  • Wafer At Cassette Mapping Graphic
  • Bernoulli end effector wafer handling, built-in vacuum selection
  • Advanced 3-axis Robot Assembly
  • Intelligence Wafer alignment, Wafer Centering and Notch / Flat Finding
  • Built-in WID OCR Reader
  • Recipe Wafer Control System
  • Handheld Barcode reader for Lot Tracking
  • Wafer Flipper Assembly
  • PC Base Software
  • Built-in N2 purging for Loadport