Model: MDA-80SA
The MDA-80SA is a brand new model and respresents next generation of Full-Field lithography systems. This brand new Semi Automatic Aligner platform offers a higher overlay accuracy and more reliable operation. Joystick control and touch panel are more user friendly to acces in your process.
Specifications:
- Type: Joystick control Semi-Auto (Mask Aligner)
- Mask size: up to 9" x 9"
- Substrate size: piece to 8" x 8"
- UV lamp& Power: 2kW & power supply
- Uniform beam size: 10.25" x 10.25"
- Beam Uniformity:<±3~5% >
- Beam wavelength: 350 ~ 450nm
- 365nm Intensity: 15 ~ 25mW/cm2
- Alignment accuracy: 1um
- Process resolution: 1um@1um PR thickness with vacuum contact
- Process mode: Soft, Hard, Vacuum contact& Proximity
- Substrate chuck moving: x,y,z& (theta) (Motorized)
