8" Mask Aligner and Exposure System - 2 kW UV Lamp

8" Mask Aligner and Exposure System

Model: MDA-80SA

The MDA-80SA is a brand new model and respresents next generation of Full-Field lithography systems. This brand new Semi Automatic Aligner platform offers a higher overlay accuracy and more reliable operation. Joystick control and touch panel are more user friendly to acces in your process.

Specifications:

• Type: Joystick control Semi-Auto (Mask Aligner)
• Mask size: up to 9" x 9"
• Substrate size: piece to 8" x 8"
• UV lamp& Power: 2kW & power supply
• Uniform beam size: 10.25" x 10.25"
• Beam Uniformity:<±3~5% >
• Beam wavelength: 350 ~ 450nm
• 365nm Intensity: 15 ~ 25mW/cm2
• Alignment accuracy: 1um
• Process resolution: 1um@1um PR thickness with vacuum contact
• Process mode: Soft, Hard, Vacuum contact& Proximity
• Substrate chuck moving: x,y,z& (theta) (Motorized)