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MIDAS SYSTEM CO., Ltd.

8" Mask Aligner and Exposure System - 1000W UV Lamp

8" Mask Aligner and Exposure System - 1000W UV Lamp
MIDAS SYSTEM CO., Ltd.

8" Mask Aligner and Exposure System - 1000W UV Lamp

Product description
Specifications
Datasheet & videos
8" Mask Aligner and Exposure System

Model: MDA-80FA

Specifications:
  • Type: Full automatic (Mask Aligner)
  • Mask size: up to 9" x 9"
  • Substrate size: 8"
  • UV lamp & Power: 2kW & power supply
  • Uniform beam size: 10.25" x 10.25"
  • Beam Uniformity: <±5%
  • Beam wavelength: 350 ~ 450nm
  • 365nm Intensity: ~25mW/cm2
  • Alignment accuracy: 1um
  • Process resolution: 1um@1um PR thickness with vacuum contact
  • Process mode: Soft, Hard, Vacuum contact & Proximity
  • Substrate chuck moving: X, Y, Z & (theta) (Motorized)
  • Pre-aligner: ±50um