MIDAS
6" Mask Aligner and Exposure System - 350W UV Lamp
MIDAS
6" Mask Aligner and Exposure System - 350W UV Lamp
Brand
MIDAS
Product Number
MDA-600S
Substrate size
6" (150mm)
System type
Semi Automatic
Light source
350W UV Lamp
Status
Request information
6" Mask Aligner and Exposure System
Model: MDA-600S
The MDA-600S is widely used for MEMS, LED and Semiconductor industry. It can provide a higher performance of alingment accuracy and resolution. It is an ideal and economical tool for Universities and Research Centers.
Specifications:
Model: MDA-600S
The MDA-600S is widely used for MEMS, LED and Semiconductor industry. It can provide a higher performance of alingment accuracy and resolution. It is an ideal and economical tool for Universities and Research Centers.
Specifications:
- Type: PC control semi auto
- Mask size: up to 7" x 7"
- Substrate size: piece to 6"
- UV lamp & Power: 350W & power supply
- Uniform beam size: 6.25" x 6.25"
- Beam Uniformity: <±5%
- Beam wavelength: 350 ~ 450nm
- 365nm Intensity: ~25mW/cm2
- Alignment accuracy: 1um
- Process resolution: 1um@1um PR thickness with vacuum contact
- Process mode: Soft, Hard, Vacuum contact & Proximity
- Substrate chuck moving: x,y,z & (theta)