The MDA-400M-6 is designed for research organizations who want to work with a state of the art technology mask aligner. This highly accurate system allows researchers to easily develop their processes on wafers up to 6".
Standard Features:
Manual control system
PC & PLC control
Sample size: Up to 6" diameter
Mask holder size: Up to 7" x 7"
UV lamp: 350W
350W mercury short arc lamp& power supply
Dual CCD zoom microscope and 19" LCD monitor
Large area stationary alignment tooling module with X, Y, Z and theta motion
