6" (150mm) & 8" (200mm) 1-Cassette Reader / Sorter

6" (150mm) & 8" (200mm) 1-Cassette Reader / Sorter

Model: HMS2015
(Designed as Reader, Upgradable to Sorter)

The HMS-Series is designed to read the Wafer ID's of a Waferlot. As an option the system is also able to sort wafers in a single cassette using a wafer-puffer. With this system it is possible read, sort, compress wafer-lots, or create individual wafer-mix as desired. The system is equipped with one automatic tilting load-port, optical wafer notch/flat-aligner, a linear-robot and wafer ID Reader. 6" and 8" wafer-capability without changing any hardware (other wafer sizes on request). The throughput of this system is extremly high based on the smart design.

Models available for:

• 4" (100mm)
• 5" (125mm)
• 6" (150mm)
• 8" (200mm)

Specifications:

• For 6" (150mm) & 8" (200mm) Wafers
• Wafer Thickness: 220µ - 700µ
• 1 Cassette Reader / Sorter
• Automatic System
• Optical Wafer Alignment
• Insight 1700 Barcode / OCR Reading
• ESD-Safe
• Vacuum Required
• 13/15 Slot Cassette Capability
• Throughput up to 700 wph
• Footprint: 1000 mm x 450 mm
• Full SECS/GEM Compliance

*** Note: Please specify cassette model number(s) when ordering ***