TBP
6" (150mm) & 8" (200mm) 1-Cassette Reader / Sorter
TBP
6" (150mm) & 8" (200mm) 1-Cassette Reader / Sorter
6" (150mm) & 8" (200mm) 1-Cassette Reader / Sorter
Model: HMS2015
(Designed as Reader, Upgradable to Sorter)
The HMS-Series is designed to read the Wafer ID's of a Waferlot. As an option the system is also able to sort wafers in a single cassette using a wafer-puffer. With this system it is possible read, sort, compress wafer-lots, or create individual wafer-mix as desired. The system is equipped with one automatic tilting load-port, optical wafer notch/flat-aligner, a linear-robot and wafer ID Reader. 6" and 8" wafer-capability without changing any hardware (other wafer sizes on request). The throughput of this system is extremly high based on the smart design.
Models available for:
Specifications:
*** Note: Please specify cassette model number(s) when ordering ***
Model: HMS2015
(Designed as Reader, Upgradable to Sorter)
The HMS-Series is designed to read the Wafer ID's of a Waferlot. As an option the system is also able to sort wafers in a single cassette using a wafer-puffer. With this system it is possible read, sort, compress wafer-lots, or create individual wafer-mix as desired. The system is equipped with one automatic tilting load-port, optical wafer notch/flat-aligner, a linear-robot and wafer ID Reader. 6" and 8" wafer-capability without changing any hardware (other wafer sizes on request). The throughput of this system is extremly high based on the smart design.
Models available for:
- 4" (100mm)
- 5" (125mm)
- 6" (150mm)
- 8" (200mm)
Specifications:
- For 6" (150mm) & 8" (200mm) Wafers
- Wafer Thickness: 220µ - 700µ
- 1 Cassette Reader / Sorter
- Automatic System
- Optical Wafer Alignment
- Insight 1700 Barcode / OCR Reading
- ESD-Safe
- Vacuum Required
- 13/15 Slot Cassette Capability
- Throughput up to 700 wph
- Footprint: 1000 mm x 450 mm
- Full SECS/GEM Compliance
*** Note: Please specify cassette model number(s) when ordering ***
