Model: MDA-400LJ (als available for 6" > MDA400LJ-6)
The MDA-400LJ is used for Semiconductor & Application Process. This machine can provide a higher performance of your process. It is an ideal and economical tool for Universities and Research centers.
Standard Features:
Manual & pneumatic control system
Sample size: Up to 4" diameter
Mask size: Up to 5" × 5"
UV LED light source with power supply
Wavelength 365 nm (i-line)
Dual CCD zoom microscope and dual monitor
Alignment tooling module with X, Y, Z and theta motion (micrometer)
Wedge error compensation system (air bearing type)
