4" Mask Aligner and Exposure System - 350W UV Lamp

4" Mask Aligner and Exposure System - 350W UV Lamp

Model: MDA-40FA

The MDA-40FA is a brand new model and represents next generation of Full-Field lithography systems. The brand new Full Auto Aligner platform offers a higher Overlay Accuracy and more reliable operation. It is great for LED. This Machine has a higher productivity and is includes user friendly controls.

Specifications:

• Type: Full automatic (Mask Aligner)
• Mask size up to 7" x 7"
• Substrate size: up to 6"
• UV lamp & Power: 350W & power supply
• Uniform beam size: 6.25" x 6.25"
• Beam Uniformity: <±3%
• Beam wavelength: 350 ~ 450nm
• 365nm Intensity: ~25mW/cm2
• Alignment accuracy: 1um
• Process resolution: 1um@1um PR thickness with vacuum contact
• Process mode: Soft, Hard, Vacuum contact & Proximity
• Substrate chuck moving: x,y,z & ? (Motorized)
• Pre-aligner: ±50um