MIDAS SYSTEM CO., Ltd.
4" Mask Aligner and Exposure System - 350W UV Lamp
MIDAS SYSTEM CO., Ltd.
4" Mask Aligner and Exposure System - 350W UV Lamp
4" Mask Aligner and Exposure System
Model: MDA-400M
The MDA-400M is designed for research organizations who want to work with a state of the art technology mask aligner.This highly accurate system allows researchers to easily develop their processes on either small substrate pieces or wafers up to 4".
Standard Features:
Model: MDA-400M
The MDA-400M is designed for research organizations who want to work with a state of the art technology mask aligner.This highly accurate system allows researchers to easily develop their processes on either small substrate pieces or wafers up to 4".
Standard Features:
- Manual control system
- Sample size: Up to 4" diameter
- Mask holder size: Up to 5" x 5"
- UV lamp: 350W
- 350W mercury short arc lamp& power supply
- Dual CCD zoom microscope and 19" LCD monitor
- Large area stationary alignment tooling module with X, Y, Z and theta motion
- Wedge error compensation (leveling type)
- Dimensions: 1000 (W) x 917 (D) x 781 (H) mm
- Weight: 350 kg
- Warranty: 1 year
Brand
MIDAS SYSTEM CO., Ltd.
Product Number
MDA-400M
Substrate size
4" (100mm)
System type
Manual
Light source
350W UV Lamp
Status
Request information