2-Cassette Sorter (6") 150 mm

6" (150mm) 2-Cassette Sorter
Model: CTS1500

The CTS-Series is designed for automatic sorting based on wafer Id’s. With this system it is possible to split, merge, sort, compress wafer-lots, or create individual wafer-mix as desired. The system is equipped with two load-ports and a linear-robot (Optical Wafer notch/flat Aligner and ID Reader are optional). 6" and 8" wafer-capability without changing any hardware (other wafer sizes on request). The throughput of this system is extremly high based on the smart design.

Models available for:

• 4" (100 mm)
• 5" (125 mm)
• 6" (150 mm)
• 8" (200 mm)
   

Specifications:

• For 6" (150mm) Wafers
• Wafer Thickness: 220µ - 700µ
• 2 Cassette Sorter
• Automatic System
• ESD-Safe
• Vacuum Required
• 25 Slot Cassettes
• Throughput up to 700 wph
• Footprint: 1000 mm x 900 mm x 450 mm (L x H x W)

Optional Features:

• RFID Cassette Identification
• Wafer Backside ID Reading
• Vacuum Free Edge Gripping
• Thin Wafer Capability
• Wafer Flipping
• 13/15 Slot Cassette Capability
• Wafer Alignment
• Barcode / OCR Reading
• Full SECS/GEM Compliance

*** Note: Please specify cassette model numbers when ordering ***