On-site servicing for the entire range of APT, WHS or TB Ploner automated wafer handling equipment: wafer sorters, ID mapppers, and transfer systems. Customized in-house training on both operation and maintenance.
On-site upgrade for existing Semitool SAT, SRD tools or Akrion robot wet benches - replacing the old automation with a modern, high reliability long-life unit and software.
On-site upgrading of peristaltic pumps to high precision flow controllers for major slurry cost savings, increased yield and zero maintenance downtime. Rapid ROI. On-site process development, customization and installation of a CMP Slurry Injection System – a quick win extra margin for slurry savings and process yield improvement.
On-site upgrading of DNS scrubber nozzle or brush to the latest technology single-wafer megasonic cleaner. Replacement of Mirra® Mesa megasonic cleaning tank with a high reliability long-life unit.
