High-Purity PFA & PVDF Process Heaters for Wet Processing

Configurable esPRO® Immersion Heaters & Inline Heaters for Cleanroom & Semiconductor Applications

Achieve precise semiconductor temperature control in ultra-pure wet-process applications with the esPRO® configurable process heater series. Designed for seamless integration into cleanroom installations across semiconductor, LED, solar, MEMS, and life-science industries, this modular platform overcomes standard heater limitations. Configure your high-purity fluid heater with specific housings, connections, and controls.

Discover your solutions for heater applications

Inline heater

Immersion heater

Tank heater

Heat exchanger

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Drop-In Compatibility for Existing Setups

EsPRO® process heaters are engineered for:

Drop-in compatibility
Enabling replacement
Existing units often without requiring plumbing or control system modifications for minimizing downtime.

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Application-Specific Heater Configuration

Our engineers will design an esPRO® chemical heater or DI water heater configuration specific to your wet process requirements, footprint, and applications like wet etching or wafer processing.

PFA/PVDF Heaters for Aggressive Chemistries & Ultra-Purity

Ultra-pure PFA or PVDF construction ensures exceptional resistance for heating DI water (UPW), aggressive acids, bases, and chemicals up to 180°C. Meeting strict purity standards, this esPRO® PFA/PVDF heater is ideal for:

Contaminant-sensitive manufacturing
Etching bath heater
Chemical bath heater

Reliability & Safety: SEMI S3 Certified Process Heaters

Manufactured in Germany, our rugged semiconductor heaters ensure operational reliability. Standard features include:

Redundant temperature interlocks for robust over-temperature protection.
SEMI S3, CE, and UL certifications (Immersion/tank heaters: SEMI S3 & CE).
Individual factory test reports certifying performance and safety parameters.

High-Efficiency Direct Immersion Heater Design

The direct-immersion heater design places the semiconductor heating element in the fluid for maximum efficiency.

Benefits

Rapid thermal response
Uniform heating
Precise process control
Minimal energy use

esPRO® heaters key benefits

Wetted parts constructed from ultra-pure PFA or PVDF
Integrated over-temperature thermocouple
Dual interlock safety system
Grounding wire option (Tantalum or Platinum tip)
Wide power range: 1 kW to 40 kW
Comprehensive factory test report included
Standard models and fully configurable units available
Maintenance-free design for extended service life
Operating temperatures up to 180 °C

Configure Your Inline Heater or Immersion Heater Solution

Specify your esPRO® inline heater or modular immersion heater configuration for your wet bench equipment or other cleanroom process. Contact SPS International to design your ideal process heating equipment solution.