
SYSKEY TECHNOLOGY Co., Ltd.
Syskey Technology Co., Ltd. is a leading supplier in high quality Thin Film equipment for R&D and industrial production. Syskey product portfolio range from Sputter, E-Beam, Thermal Evaporator, ALD, PEALD, RIE, PECVD, and LPCVD in manual, semi-automated or fully automated solutions. One of our strength is customizing and realizing Thin Film systems to our customers’ requirement. We believe in providing good quality product and honest service to our customers and have built enviable reputation and reliability with our worldwide customers. Following this success, Syskey continue to develop best equipment to meet our customers’ need for today and future.
Main activities:
- Magnetron sputter
- Thermal evaporation
- Electron beam evaporation
- CVD
- ALD
- Plasma etching
POLISHING
Sputter Coater options
THIN-FILMS

ALE

Batch Type PECVD

Co-Sputter

Diamond Like Carbon (DLC)

E-Beam Evaporation System

FPD-PECVD

FPD-PVD

ICP-CVD

ICP-RIE

In-Line Sputter

Lift-Off

LPCVD

Metal Thermal

Multi-Layer Sputter

Organic Material

PECVD

Plasma ALD

RIE
Sputter Coater options

Thermal ALD

UHV E-Beam

UHV Sputter
The latest SYSKEY TECHNOLOGY Co., Ltd. products
Thin-Films
Ti Target
Sputter Coater options
SYSKEY TECHNOLOGY Co., Ltd.
Up to 3" (75mm)
Custom Solution
Cost Efficient Designs
polishing
Cr sputtering target
Sputter Coater options
SYSKEY TECHNOLOGY Co., Ltd.
Up to 3" (75mm)
Custom Solution
Cost Efficient Designs
Thin-Films
Ta2O5 Target
Sputter Coater options
SYSKEY TECHNOLOGY Co., Ltd.
Up to 3" (75mm)
Custom Solution
Cost Efficient Designs
Thin-Films
Ni Target (Non-magnetic)
Sputter Coater options
SYSKEY TECHNOLOGY Co., Ltd.
Up to 3" (75mm)
Custom Solution
Cost Efficient Designs
thin-films
UHV Sputter-Sys
UHV Sputter
SYSKEY TECHNOLOGY Co., Ltd.
For UHV environment, it is very important to scientific research, because experiments often require surfaces to be maintained in a contamination-free state for
up to 12 inch
thin-films
Multi-Layer-Sputter-Sys
Multi-Layer Sputter
SYSKEY TECHNOLOGY Co., Ltd.
The high-quality multilayer films are becoming increasingly important in precision systems that single material thin film cannot practice the required specifica
up to 12 inch
thin-films
In-Line-Sputter-Sys
In-Line Sputter
SYSKEY TECHNOLOGY Co., Ltd.
In-Line Sputtering Deposition System is that substrates passed linearly beneath one or more sputter cathodes to acquire their thin film coating.
up to 1100 x 1300 mm2 (glass)
thin-films
FPD-PVD-Sys
FPD-PVD
SYSKEY TECHNOLOGY Co., Ltd.
up to 550 x 650 mm2 (glass)