Wetprocess

Process equipment for heated DI water and
chemical supply, including chemical pumps, PFA
fittings and process baths or wet etch equipment.

Accumulator CMP

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Accumulator CMP (3)
Pump CMP (4)
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Wetprocess
PA-C10M-J1912
Accumulator CMP
PILLAR
10 lpm Slurry Accumulator  in Ø19 / Out Ø12

Wetprocess » Pump CMP » Accumulator CMP
Wetprocess
PA-C20M-J2519
Accumulator CMP
PILLAR
20 lpm Slurry Accumulator  in Ø25 / Out Ø19

Wetprocess » Pump CMP » Accumulator CMP
Wetprocess
PA-C40M-J2525
Accumulator CMP
PILLAR
40 lpm Slurry Accumulator  in Ø25 / Out Ø25

Wetprocess » Pump CMP » Accumulator CMP