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wetprocess
Espro-12-CFTHES
Filter Capsules / Disposables
ESPRO
Photoresist
40ºC
2 nm
wetprocess
Espro-12-CFTHPS
Filter Capsules / Disposables
ESPRO
Photoresist
40ºC
2 nm
wetprocess
Espro-12-CMPZJ
Filter Capsules / Disposables
ESPRO
CMP
wetprocess
Espro-12-DiscFilter
Filter Capsules / Disposables
ESPRO
Water, Gas
2 nm
wetprocess
Espro-12-GPFH
Gas Filters
ESPRO
The GPFH gas filters are made of electronic grade stainless steel and designed for gas filtration at high temperature and pressure in semiconductor processes.
Gas
90ºC
0.0015 μm
wetprocess
Espro-12-GSSG
Gas Filters
ESPRO
The GSSG gas filters are made of electronic grade stainless steel and designed for gas filtration at high temperature and pressure in semiconductor processes.
Gas
400ºC
0.003 μm
wetprocess
Espro-12-GSSL
Gas Filters
ESPRO
The GSSL gas filters are made of electronic grade stainless steel and designed for gas filtration at high temperature and pressure in semiconductor processes.
Gas
170ºC
0.003 μm
wetprocess
Espro-12-GSSS
Gas Filters
ESPRO
The GSSS gas filters are made of electronic grade stainless steel and designed for gas filtration at high temperature and pressure in semiconductor processes.
Gas
400ºC
0.30 μm
wetprocess
Espro-12-GSSV
Gas Filters
ESPRO
The GSSV gas filters are made of electronic grade stainless steel and designed for gas filtration at high temperature and pressure in semiconductor processes.
Gas
170ºC
0.003 μm
wetprocess
Espro-12-Gx-series-cartridge-filters
Filter Cartridges / Non-disposables
ESPRO
GF series photoresist filters use glass microfiber as filter medium, which features high absorption and high efficiency.
Multipurpose
80ºC
0.30 μm
wetprocess
Espro-12-HFx-cartridge-filters
Filter Cartridges / Non-disposables
ESPRO
HFH/HFHH Series are high flow water filter cartridges with single open-ended and outside to inside flow pattern. It has a large diameter of 152 mm (6").
Water
80ºC
wetprocess
Espro-12-HGSS
Filter Housings
ESPRO
HGSS industrial filter housing is designed for critical process filtration with single filter capacity. Easy and fast installation. Tri-clamp sealed housing
Gas
130ºC
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