Wetprocess

Process equipment for heated DI water and
chemical supply, including chemical pumps, PFA
fittings and process baths or wet etch equipment.

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SPIN150i-200i In-Deck
(3)
POLOS-200 In-Deck
(2)
POLOS-300 In-Deck
(2)
Wafer Cleaning
(1)
Substrate Holder
(1)
Up to 6" (150mm)
Up to 8" (200mm)
NPP
PTFE
In-Deck Version

SPIN150i-200i In-Deck

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wetprocess
SPIN200i-PTFE-INT Single Substrate Spin Processor
42023
SPIN150i-200i In-Deck
POLOS
SPIN200i-PTFE-INT Single Substrate Spin Processor wetprocess » Cleaning » SPIN150i-200i In-Deck
Up to 8" (200mm)
PTFE
In-Deck Version
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wetprocess
SPIN150i-NPP-INT Single Substrate Spin Processor
42025
SPIN150i-200i In-Deck
POLOS
SPIN150i-NPP-INT Single Substrate Spin Processor wetprocess » Cleaning » SPIN150i-200i In-Deck
Up to 6" (150mm)
NPP
In-Deck Version
View product
wetprocess
SPIN150i-PTFE-INT Single Substrate Spin Processor
42026
SPIN150i-200i In-Deck
POLOS
SPIN150i-PTFE-INT Single Substrate Spin Processor wetprocess » Cleaning » SPIN150i-200i In-Deck
Up to 6" (150mm)
PTFE
In-Deck Version
View product