Wetprocess

Process equipment for heated DI water and
chemical supply, including chemical pumps, PFA
fittings and process baths or wet etch equipment.

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Products

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Wetprocess
41367
Substrate Holder
APT
4" - 8" PTFE Double-sided substrate holder
wetprocess
42022
SPIN150i-200i In-Deck
POLOS
SPIN200i-NPP-INT Single Substrate Spin Processor
Up to 8" (200mm)
NPP
In-Deck Version
wetprocess
42023
SPIN150i-200i In-Deck
POLOS
SPIN200i-PTFE-INT Single Substrate Spin Processor
Up to 8" (200mm)
PTFE
In-Deck Version
wetprocess
42025
SPIN150i-200i In-Deck
POLOS
SPIN150i-NPP-INT Single Substrate Spin Processor
Up to 6" (150mm)
NPP
In-Deck Version
wetprocess
42026
SPIN150i-200i In-Deck
POLOS
SPIN150i-PTFE-INT Single Substrate Spin Processor
Up to 6" (150mm)
PTFE
In-Deck Version
wetprocess
42841
POLOS-200 In-Deck
POLOS
Polos 200 Advanced NPP-INT
wetprocess
42842
POLOS-200 In-Deck
POLOS
Polos 200 Advanced PTFE-INT
wetprocess
44251
POLOS-300 In-Deck
POLOS
Polos 300 Advanced NPP INT
wetprocess
44252
POLOS-300 In-Deck
POLOS
Polos 300 Advanced PTFE INT
Wetprocess
910-02329-04
MegPie
Prosys Inc.
MegPie Transducer (300mm) - Sapphire
Wetprocess
910-02366-04
MegPie
Prosys Inc.
MegPie Transducer (150/200mm) Dual Zone - Stainless Steel
Wetprocess
910-02368-04
MegPie
Prosys Inc.
MegPie Transducer (200mm) - Stainless Steel
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