Thin Films

Systems for thin films, ranging from CVD and ALD atomic layer
deposition to gas filters and heating elements for diffusion ovens.

Diffusion Furnace Parts | Insulation Collars | Heating



Vestibule Blocks
Diffusion Heating Elements
SPS-Europe offers Second Source Parts for Diffusion Furnace. We offer custom designed diffusion heating elements and ‘plug and heat’ solutions for most existing horizontal or vertical diffusion furnace heaters. As 1:1 heater element retrofit or for new applications. We supply Insulation Collars and Ceramic Vestibule Blocks our collars and discs are custom fabricated. With the combination of high temperature textiles and non-ceramic insulation these products can be used with diffusion furnace at process temperatures up to 1395ºC (2543ºF), with no loss of strength or flexibility.