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thin-films
ALE-sys
ALE
SYSKEY TECHNOLOGY Co., Ltd.
ALE
As the functional size of the device is further reduced, further use of ALE is required to achieve its required accuracy.
up to 12 inch
thin-films
AT200M
ALD Systems
ANRIC
AT200M ALD system
The AT200M utilizes semiconductor grade components. Metal-sealed lines and a robust PLC driven user interface, fast cycling and high-quality single component th
(2") 50 mm
Up to 300°C
Table-top system
Thin-Films
AT410
ALD Systems
ANRIC
AT410-1 ALD System
Table-Top Atomic Layer Deposition ALD System, suitable for up to 5 lines. Substrate size up to 4" (100mm) diameter (Other Wafer Sizes on Request!)
(4") 100 mm
Up to 330°C
Table-top system
Thin-Films
AT610
ALD Systems
ANRIC
AT610 ALD System
Table-Top Atomic Layer Deposition ALD System, suitable for up to 5 lines. Substrate size up to 6" (150mm) diameter
(6") 150 mm
Up to 330°C
Table-top system
thin-films
AT650P
ALD Systems
ANRIC
AT650P ALD System
(6") 150 mm
Up to 400°C
Bench-top System
thin-films
AT650T
ALD Systems
ANRIC
AT650T ALD System
(6") 150 mm
Up to 400°C
Bench-top System
thin-films
Batch-Type-PECVD-sys
Batch Type PECVD
SYSKEY TECHNOLOGY Co., Ltd.
Batch Type PECVD
The batch type Plasma Enhanced Chemical Vapor Deposition (PECVD) can provide energy for deposition reaction.
Flexible substrate
thin-films
Co-Sputter-Sys
Co-Sputter
SYSKEY TECHNOLOGY Co., Ltd.
Co-Sputter
Co-sputtering is simultaneous coating from two or multiple sputtering targets. It is used for compound - alloy or composite material.
up to 12 inch
thin-films
Collar-ALF
Insulation Collars and Discs
Hiltex
Insulation collar ALF
4 Sizes:
Insulation collar ALF E3Insulation collar ALF F2Insulation collar ALF FB3More...
Thin-Films
DC-1300
Diffusion Heating Elements
THERMCRAFT
Duracraft - Diffusion Furnace Element
400°C to 1300°C
Stainless Steel
Standard
Thin-Films
DC-1300Plus
Diffusion Heating Elements
THERMCRAFT
Duracraft - Diffusion Furnace Element
400°C to 1300°C
Stainless Steel
Self-locking
Thin-Films
DCHT-500
Diffusion Heating Elements
THERMCRAFT
Duracraft - Diffusion Furnace Element
400°C to 1300°C
Stainless Steel
Self-locking
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