Thin Films

Systems for thin films, ranging from CVD and ALD atomic layer
deposition to gas filters and heating elements for diffusion ovens.

Products

Refine
Color
TAG 1
TAG 2
TAG 3
Order by
Thin-Films
3inch-sputter-system
Sputter Coater
Syskey
3" Sputter System (Full Automatic)

Thin-Films » Sputter Coater » Sputter Coater
Up to 3" (75mm)
Custom Solution
Cost Efficient Designs
Thin-Films
AT410
ALD Systems
ANR
AT410-1 ALD System

Thin-Films » Deposition » ALD Systems
Table-Top Atomic Layer Deposition ALD System, suitable for up to 5 lines. Substrate size up to 4" (100mm) diameter (Other Wafer Sizes on Request!)
Thin-Films
AT610
ALD Systems
ANR
AT610 ALD System

Thin-Films » Deposition » ALD Systems
Table-Top Atomic Layer Deposition ALD System, suitable for up to 5 lines. Substrate size up to 6" (150mm) diameter
Thin-Films
Auto Pressure Control
Sputter Coater options
Syskey
Up to 3" (75mm)
Custom Solution
Cost Efficient Designs
Thin-Films
Cr sputtering target
Sputter Coater options
Syskey
Up to 3" (75mm)
Custom Solution
Cost Efficient Designs
Thin-Films
EndEffectorCeramics
Replacement Parts
Solmics
End Effectors Ceramics 200mm

Thin-Films » Replacements Parts » Replacement Parts
Thin-Films
EZ_2008_200_095_000
Replacement Parts
DUHS
Send-Arm Gripper 150-200mm

Thin-Films » Replacements Parts » Replacement Parts
Thin-Films
EZ_2008_200_180_000
Replacement Parts
DUHS
Gripper 150mm

Thin-Films » Replacements Parts » Replacement Parts
Thin-Films
EZ_2008_200_227_000
Replacement Parts
DUHS
Gripper Niro Cap 150-200mm

Thin-Films » Replacements Parts » Replacement Parts
Thin-Films
EZ_2008_200-111_000
Replacement Parts
DUHS
Load Arm Gripper 150-200mm

Thin-Films » Replacements Parts » Replacement Parts
Thin-Films
FR-Basic-W
Custom Film Measurement System
THM
FR-Basic - Custom build film measurement system (based on modules)

Thin-Films » Measurement Systems » Custom Film Measurement System
Thin-Films
FR-Education-W
Film Measurement Systems
THM
FR-Education - Film measurement system for educational laboratories

Thin-Films » Measurement Systems » Film Measurement Systems
1
2
3
4
5
...