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eFOUP
(1)
Size
12" 300 mm
Wafer slots
25
First wafer position
44 mm
Wafer spacing
10 mm
Type
Front opening unified pod (FOUP)

eFOUP

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eWB0685-ASSY-1
eFOUP
ePAK
EFOUP300 Front opening unified pod 300 mm wafers
12" 300 mm
25
44 mm
10 mm
Front opening unified pod (FOUP)