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eFOUP
(1)Size
12" 300 mm
Wafer slots
25
First wafer position
44 mm
Wafer spacing
10 mm
Type
Front opening unified pod (FOUP)
eFOUP
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eFOUP
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Category
eFOUP
(1)Size
12" 300 mm
Wafer slots
25
First wafer position
44 mm
Wafer spacing
10 mm
Type
Front opening unified pod (FOUP)
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process-cassettes
eWB0685-ASSY-1
eFOUP
ePAK
12" 300 mm
25
44 mm
10 mm
Front opening unified pod (FOUP)