UH102-12 UV Curing System

UH102-12 UV Curing System

Models UH102-8 and UH102-12 UV Curing Systems offer inexpensive solutions for the curing of UV films in easy-to-use benchtop packages, without sacrificing control or versatility. Ideal for low to mid-volume production and R&Dapplications

Features:

• Up to 12" (300mm) wafers
• Self-contained benchtop system
• Easily programmable, microprocesor-based controller
• Nitrogen purge for efficient curing
• Exhaust hook-up
• Lamp intensity measurment port
• Serpentine-style grid lamp for even, consistent UV exposure
• 230VAC 50Hz

Specifications:

• Power: 110 VAC, 12 A, 50/60 Hz
• N2: 30 psi @ 0.5 CFM (min.)
• UV Lamp: Mercury Vapor
• Wave Length: 254.7 nm
• Intensity: 25 mW/cm²

Options:

• Film Frame Adapter up to 12" (300mm) wafer size
• Ring Adapter up to 12" (300mm) wafer size
• UV Lamp Intensity Radiometer (requires Sensor/Attenuator Assembly, below)
• Sensor/Attenuator Assembly (requires Radiometer, above)
• 'CE' Mark